Short for
Micro-Opto-Electro-Mechanical Systems,
also known as optical
MEMS (
Micro-Electro-Mechanical
Systems) and generally taken to include waveguides, diffraction
gratings, moving mirror and moving bubble devices. The primary goal is to endow
systems with the capability to alter or modulate the path of a light beam, and, in
some cases, to temporally or spectrally modify the light beam. The most common
micro-optical elements are those that reflect, diffract or refract light. MOEMS
is the manipulation of light in one, two, or three-dimensional space.