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Short for Micro-Opto-Electro-Mechanical Systems, also known as optical MEMS (Micro-Electro-Mechanical Systems) and generally taken to include waveguides, diffraction gratings, moving mirror and moving bubble devices. The primary goal is to endow systems with the capability to alter or modulate the path of a light beam, and, in some cases, to temporally or spectrally modify the light beam. The most common micro-optical elements are those that reflect, diffract or refract light. MOEMS is the manipulation of light in one, two, or three-dimensional space.

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